The materials science of microelectronics / Klaus J. Bachmann.
The materials science of microelectronics / Klaus J. Bachmann.
About this item
Full title
Author / Creator
Publisher
New York, N.Y. : VCH, c1995.
Record Identifier
MMS ID
Language
English
Formats
Physical Description
Physical content
viii, 541 p. : ill. ; 24 cm.
Contents
1. Introduction -- 2. The Electronic Structure of Atoms and Molecules. 2.1. Early Concepts of Atomic Structure and Bonding. 2.2. Elements of Quantum Mechanics. 2.3. Atomic Wave Functions and Energy Eigenvalues. 2.4. Molecular Wave Functions and Energy Eigenvalues. 2.5. Molecular Symmetry -- 3. The E...
6.2. Low-Pressure and Plasma-Enhanced Vapor Deposition. 6.3. Organometallic Chemical Vapor Deposition. 6.4. Molecular Beam Epitaxy and Chemical Beam Epitaxy -- 7. Pattern Definition and Etching. 7.1. Photolithographic Pattern Definition. 7.2. Ultrahigh-Resolution Patterning. 7.3. Wet Etching. 7.4. D...
Publication information
Publisher
New York, N.Y. : VCH, c1995.
Place of Publication
New York (State)
Date Published
c1995.
Subjects
More information
Alternative Titles
Full title
The materials science of microelectronics / Klaus J. Bachmann.
Authors, Artists and Contributors
Author / Creator
Notes
General note
Includes bibliographical references and index.
Contextual Information
Date Copyright
c1995.
Identifiers
Primary Identifiers
Record Identifier
74VKmJpZmQNZ
Permalink
https://devfeature-collection.sl.nsw.gov.au/record/74VKmJpZmQNZ
Other Identifiers
ISBN
0895732807
9780895732804 (alk. paper)
0895732807 (alk. paper)
9780895732804
DDC
621.381
MMS ID
991020536639702626
