Plasma etching in semiconductor fabrication / Russ A. Morgan.
Plasma etching in semiconductor fabrication / Russ A. Morgan.
About this item
Full title
Plasma etching in semiconductor fabrication / Russ A. Morgan.
Author / Creator
Publisher
Amsterdam ; Oxford : Elsevier, 1985.
Date
1985.
Call Numbers
N621.38152/55
Record Identifier
74VvXDLJBEjA
MMS ID
991010888589702626
Language
English
Formats
Physical Description
Physical content
x, 316 p. : ill.
Publication information
Publisher
Amsterdam ; Oxford : Elsevier, 1985.
Series
Place of Publication
England
Date Published
1985.
Subjects
More information
Alternative Titles
Full title
Plasma etching in semiconductor fabrication / Russ A. Morgan.
Authors, Artists and Contributors
Author / Creator
Notes
General note
Plasma technology ; v.1.
Semiconductor devices. Manufacture. Use of plasma etching (BNB/PRECIS)
Includes bibliograpical references and index.
Identifiers
Primary Identifiers
Call Numbers
N621.38152/55
Record Identifier
74VvXDLJBEjA
Permalink
https://devfeature-collection.sl.nsw.gov.au/record/74VvXDLJBEjA
Other Identifiers
ISBN
0444424695 (series)
9780444424198
0444424199
9780444424693 (series)
DDC
621.38152
MMS ID
991010888589702626
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