Influence of design and fabrication on RF performance of capacitive RF MEMS switches
Influence of design and fabrication on RF performance of capacitive RF MEMS switches
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Publisher
Berlin/Heidelberg: Springer Berlin Heidelberg
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Language
English
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Publisher
Berlin/Heidelberg: Springer Berlin Heidelberg
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Contents
Shunt capacitive radio-frequency microelectromechanical system (RF MEMS) switches were fabricated on silicon substrate and characterized in the RF domain. Various switch typologies were obtained by three different approaches, which are: (1) the change of the bridge geometric parameters, (2) the covering of the actuator with a floating metal, and (3...
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Full title
Influence of design and fabrication on RF performance of capacitive RF MEMS switches
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TN_cdi_crossref_citationtrail_10_1007_s00542_016_2829_z
Permalink
https://devfeature-collection.sl.nsw.gov.au/record/TN_cdi_crossref_citationtrail_10_1007_s00542_016_2829_z
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ISSN
0946-7076
E-ISSN
1432-1858
DOI
10.1007/s00542-016-2829-z
