Measuring the Quality Factor in MEMS Devices
Measuring the Quality Factor in MEMS Devices
About this item
Full title
Measuring the Quality Factor in MEMS Devices
Author / Creator
Journal title
Micromachines (Basel), 2015-12, Vol.6 (12), p.1935-1945
Language
English
Formats
More information
Scope and Contents
Contents
This paper demonstrates and compares different experimental techniques utilized to estimate the quality factor (Q) and natural frequency from non-contact measurements of Microelectromechanical Systems (MEMS) motions. The relative merits of those techniques are contrasted in Q factor estimation for a cantilever beam MEMS actuator, operated in three...
Alternative Titles
Full title
Measuring the Quality Factor in MEMS Devices
Authors, Artists and Contributors
Identifiers
Primary Identifiers
Record Identifier
TN_cdi_crossref_citationtrail_10_3390_mi6121466
Permalink
https://devfeature-collection.sl.nsw.gov.au/record/TN_cdi_crossref_citationtrail_10_3390_mi6121466
Other Identifiers
ISSN
2072-666X
E-ISSN
2072-666X
DOI
10.3390/mi6121466
How to access this item
Log in as a Library member
