Nonlinear dynamics in the flexible shaft rotating–lifting system of silicon crystal puller using Czo...
Nonlinear dynamics in the flexible shaft rotating–lifting system of silicon crystal puller using Czochralski method
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Publisher
Dordrecht: Springer Netherlands
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Language
English
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Publisher
Dordrecht: Springer Netherlands
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Scope and Contents
Contents
Silicon crystal puller (SCP) is key equipment in silicon wafer manufacture, which is, in turn, the base material for the most currently used integrated circuit chips. With the development of the techniques, the demand for longer mono-silicon crystal rod with larger diameter is continuously increasing in order to reduce the manufacture time and the...
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Full title
Nonlinear dynamics in the flexible shaft rotating–lifting system of silicon crystal puller using Czochralski method
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Record Identifier
TN_cdi_crossref_primary_10_1007_s11071_020_05592_9
Permalink
https://devfeature-collection.sl.nsw.gov.au/record/TN_cdi_crossref_primary_10_1007_s11071_020_05592_9
Other Identifiers
ISSN
0924-090X
E-ISSN
1573-269X
DOI
10.1007/s11071-020-05592-9
