Laser-induced microjet-assisted ablation for high-quality microfabrication
Laser-induced microjet-assisted ablation for high-quality microfabrication
About this item
Full title
Author / Creator
Guo, Yang , Qiu, Pei , Xu, Shaolin and Cheng, Gary J
Publisher
Bristol: IOP Publishing
Journal title
Language
English
Formats
Publication information
Publisher
Bristol: IOP Publishing
Subjects
More information
Scope and Contents
Contents
Liquid-assisted laser ablation has the advantage of relieving thermal effects of common laser ablation processes, whereas the light scattering and shielding effects by laser-induced cavitation bubbles, suspended debris, and turbulent liquid flow generally deteriorate laser beam transmission stability, leading to low energy efficiency and poor surfa...
Alternative Titles
Full title
Laser-induced microjet-assisted ablation for high-quality microfabrication
Authors, Artists and Contributors
Author / Creator
Identifiers
Primary Identifiers
Record Identifier
TN_cdi_crossref_primary_10_1088_2631_7990_ac6632
Permalink
https://devfeature-collection.sl.nsw.gov.au/record/TN_cdi_crossref_primary_10_1088_2631_7990_ac6632
Other Identifiers
ISSN
2631-8644
E-ISSN
2631-7990
DOI
10.1088/2631-7990/ac6632
