Analysis of Individual Collision Cascade Parameters during Irradiation of Ga2O3 by Atomic and Molecu...

https://devfeature-collection.sl.nsw.gov.au/record/TN_cdi_crossref_primary_10_1134_S1063782624030163

Analysis of Individual Collision Cascade Parameters during Irradiation of Ga2O3 by Atomic and Molecular Ions

Full title

Analysis of Individual Collision Cascade Parameters during Irradiation of Ga2O3 by Atomic and Molecular Ions

Author / Creator

Journal title

Semiconductors (Woodbury, N.Y.), 2024-03, Vol.58 (3), p.279-283

Language

English

Formats

Full title

Analysis of Individual Collision Cascade Parameters during Irradiation of Ga2O3 by Atomic and Molecular Ions

Author / Creator

Record Identifier

TN_cdi_crossref_primary_10_1134_S1063782624030163

Permalink

https://devfeature-collection.sl.nsw.gov.au/record/TN_cdi_crossref_primary_10_1134_S1063782624030163

ISSN

1063-7826

E-ISSN

1090-6479

DOI

10.1134/S1063782624030163

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