Reliability Evaluation Based on Mathematical Degradation Model for Vacuum Packaged MEMS Sensor
Reliability Evaluation Based on Mathematical Degradation Model for Vacuum Packaged MEMS Sensor
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Basel: MDPI AG
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Language
English
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Basel: MDPI AG
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Contents
Vacuum packaging is used extensively in MEMS sensors for improving performance. However, the vacuum in the MEMS chamber gradually degenerates over time, which adversely affects the long-term performance of the MEMS sensor. A mathematical model for vacuum degradation is presented in this article for evaluating the degradation of vacuum packaged MEMS...
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Full title
Reliability Evaluation Based on Mathematical Degradation Model for Vacuum Packaged MEMS Sensor
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TN_cdi_doaj_primary_oai_doaj_org_article_00b2e56b85a14bb78b8b2f5080cb62ab
Permalink
https://devfeature-collection.sl.nsw.gov.au/record/TN_cdi_doaj_primary_oai_doaj_org_article_00b2e56b85a14bb78b8b2f5080cb62ab
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ISSN
2072-666X
E-ISSN
2072-666X
DOI
10.3390/mi13101713
