Design and Fabrication of a Miniaturized GMI Magnetic Sensor Based on Amorphous Wire by MEMS Technol...
Design and Fabrication of a Miniaturized GMI Magnetic Sensor Based on Amorphous Wire by MEMS Technology
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Author / Creator
Chen, Jiawen , Li, Jianhua , Li, Yiyuan , Chen, Yulong and Xu, Lixin
Publisher
Switzerland: MDPI AG
Journal title
Language
English
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Publication information
Publisher
Switzerland: MDPI AG
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Scope and Contents
Contents
A miniaturized Co-based amorphous wire GMI (Giant magneto-impedance) magnetic sensor was designed and fabricated in this paper. The Co-based amorphous wire was used as the sense element due to its high sensitivity to the magnetic field. A three-dimensional micro coil surrounding the Co-based amorphous wire was fabricated by MEMS (Micro-Electro-Mech...
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Full title
Design and Fabrication of a Miniaturized GMI Magnetic Sensor Based on Amorphous Wire by MEMS Technology
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Record Identifier
TN_cdi_doaj_primary_oai_doaj_org_article_0c667d95a5df4a6f9cfa917b6dd51dfa
Permalink
https://devfeature-collection.sl.nsw.gov.au/record/TN_cdi_doaj_primary_oai_doaj_org_article_0c667d95a5df4a6f9cfa917b6dd51dfa
Other Identifiers
ISSN
1424-8220
E-ISSN
1424-8220
DOI
10.3390/s18030732
