Nonlinear Vibration Study Based on Uncertainty Analysis in MEMS Resonant Accelerometer
Nonlinear Vibration Study Based on Uncertainty Analysis in MEMS Resonant Accelerometer
About this item
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Author / Creator
Li, Yan , Song, Linke , Liang, Shuai , Xiao, Yifeng and Yang, Fuling
Publisher
Switzerland: MDPI AG
Journal title
Language
English
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Publisher
Switzerland: MDPI AG
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Scope and Contents
Contents
This paper aims to develop a resonant accelerometer for high-sensitivity detection and to investigate the nonlinear vibration of the MEMS resonant accelerometer driven by electrostatic comb fingers. First, a nonlinear vibration model of the resonator with comb fingers in a MEMS resonant accelerometer is established. Then, the nonlinear and nonlinea...
Alternative Titles
Full title
Nonlinear Vibration Study Based on Uncertainty Analysis in MEMS Resonant Accelerometer
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Author / Creator
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Record Identifier
TN_cdi_doaj_primary_oai_doaj_org_article_194377283c2c4dd9a2616265e816cf93
Permalink
https://devfeature-collection.sl.nsw.gov.au/record/TN_cdi_doaj_primary_oai_doaj_org_article_194377283c2c4dd9a2616265e816cf93
Other Identifiers
ISSN
1424-8220
E-ISSN
1424-8220
DOI
10.3390/s20247207
