Large-Scale High-Accuracy and High-Efficiency Phase Plate Machining
Large-Scale High-Accuracy and High-Efficiency Phase Plate Machining
About this item
Full title
Author / Creator
Wang, Guanhua , Liu, Zhaoxiang , Song, Lvbin , Guan, Jianglin , Chen, Wei , Liu, Jian , Chen, Jinming , Wang, Min and Cheng, Ya
Publisher
Switzerland: MDPI AG
Journal title
Language
English
Formats
Publication information
Publisher
Switzerland: MDPI AG
Subjects
More information
Scope and Contents
Contents
In this paper, multifunctional, multilevel phase plates of quartz substrate were efficiently prepared by using a newly developed polygon scanner-based femtosecond laser photolithography system combined with inductively coupled discharge plasma reactive-ion etching (ICP-RIE) technology. The femtosecond laser photolithography system can achieve a sca...
Alternative Titles
Full title
Large-Scale High-Accuracy and High-Efficiency Phase Plate Machining
Authors, Artists and Contributors
Identifiers
Primary Identifiers
Record Identifier
TN_cdi_doaj_primary_oai_doaj_org_article_226cafbf2e8744388aab1a9e2748823e
Permalink
https://devfeature-collection.sl.nsw.gov.au/record/TN_cdi_doaj_primary_oai_doaj_org_article_226cafbf2e8744388aab1a9e2748823e
Other Identifiers
ISSN
2079-4991
E-ISSN
2079-4991
DOI
10.3390/nano14191563
