Scheduling of Single-Arm Cluster Tools with Residency Time Constraints and Chamber Cleaning Operatio...
Scheduling of Single-Arm Cluster Tools with Residency Time Constraints and Chamber Cleaning Operations
About this item
Full title
Author / Creator
Li, Jie , Qiao, Yan , Zhang, Siwei , Li, Zhiwu , Wu, Naiqi and Song, Tairan
Publisher
Basel: MDPI AG
Journal title
Language
English
Formats
Publication information
Publisher
Basel: MDPI AG
Subjects
More information
Scope and Contents
Contents
To ensure wafer quality, engineers have to impose wafer residency time constraints and chamber cleaning operations on cluster tools; this has been widely used in semiconductor manufacturing. Wafer residency time constraints and chamber cleaning operations make the scheduling problem of cluster tools more challenging. This work aims to solve such a...
Alternative Titles
Full title
Scheduling of Single-Arm Cluster Tools with Residency Time Constraints and Chamber Cleaning Operations
Authors, Artists and Contributors
Author / Creator
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Primary Identifiers
Record Identifier
TN_cdi_doaj_primary_oai_doaj_org_article_257f288a12b44a1b827447001660d77d
Permalink
https://devfeature-collection.sl.nsw.gov.au/record/TN_cdi_doaj_primary_oai_doaj_org_article_257f288a12b44a1b827447001660d77d
Other Identifiers
ISSN
2076-3417
E-ISSN
2076-3417
DOI
10.3390/app11199193
