Suspended Silicon Waveguide with Sub-Wavelength Grating Cladding for Optical MEMS in Mid-Infrared
Suspended Silicon Waveguide with Sub-Wavelength Grating Cladding for Optical MEMS in Mid-Infrared
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Author / Creator
Qiao, Qifeng , Sun, Haoyang , Liu, Xinmiao , Dong, Bowei , Xia, Ji , Lee, Chengkuo and Zhou, Guangya
Publisher
Basel: MDPI AG
Journal title
Language
English
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Publication information
Publisher
Basel: MDPI AG
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Scope and Contents
Contents
Mid-infrared (MIR) photonics are generating considerable interest because of the potential applications in spectroscopic sensing, thermal imaging, and remote sensing. Silicon photonics is believed to be a promising solution to realize MIR photonic integrated circuits (PICs). The past decade has seen a huge growth in MIR PIC building blocks. However...
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Full title
Suspended Silicon Waveguide with Sub-Wavelength Grating Cladding for Optical MEMS in Mid-Infrared
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Author / Creator
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Primary Identifiers
Record Identifier
TN_cdi_doaj_primary_oai_doaj_org_article_264bdf79b04b4cf7b05bf32e0b13eae6
Permalink
https://devfeature-collection.sl.nsw.gov.au/record/TN_cdi_doaj_primary_oai_doaj_org_article_264bdf79b04b4cf7b05bf32e0b13eae6
Other Identifiers
ISSN
2072-666X
E-ISSN
2072-666X
DOI
10.3390/mi12111311
