Review: Electrostatically actuated nanobeam-based nanoelectromechanical switches – materials solutio...
Review: Electrostatically actuated nanobeam-based nanoelectromechanical switches – materials solutions and operational conditions
About this item
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Author / Creator
Publisher
Germany: Beilstein-Institut zur Föerderung der Chemischen Wissenschaften
Journal title
Language
English
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Publication information
Publisher
Germany: Beilstein-Institut zur Föerderung der Chemischen Wissenschaften
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Scope and Contents
Contents
This review summarizes relevant research in the field of electrostatically actuated nanobeam-based nanoelectromechanical (NEM) switches. The main switch architectures and structural elements are briefly described and compared. Investigation methods that allow for exploring coupled electromechanical interactions as well as studies of mechanically or...
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Full title
Review: Electrostatically actuated nanobeam-based nanoelectromechanical switches – materials solutions and operational conditions
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Author / Creator
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Record Identifier
TN_cdi_doaj_primary_oai_doaj_org_article_291928ce1cb549e1840ddb42e439b2b9
Permalink
https://devfeature-collection.sl.nsw.gov.au/record/TN_cdi_doaj_primary_oai_doaj_org_article_291928ce1cb549e1840ddb42e439b2b9
Other Identifiers
ISSN
2190-4286
E-ISSN
2190-4286
DOI
10.3762/bjnano.9.29
