Hermetic Welding of an Optical Fiber Fabry–Pérot Cavity for a Diaphragm-Based Pressure Sensor Using...
Hermetic Welding of an Optical Fiber Fabry–Pérot Cavity for a Diaphragm-Based Pressure Sensor Using CO2 Laser
About this item
Full title
Author / Creator
Zhang, Hui , Li, Yi , Zhang, Zhuo , Yang, Chaoming , Liang, Mingshan , Hu, Yong , Wei, Heming and Pang, Fufei
Publisher
Basel: MDPI AG
Journal title
Language
English
Formats
Publication information
Publisher
Basel: MDPI AG
Subjects
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Scope and Contents
Contents
A diaphragm-based hermetic optical fiber Fabry–Pérot (FP) cavity is proposed and demonstrated for pressure sensing. The FP cavity is hermetically sealed using one-step CO2 laser welding with a cavity length from 30 to 100 μm. A thin diaphragm is formed by polishing the hermetic FP cavity for pressure sensing. The fabricated FP cavity has a fringe c...
Alternative Titles
Full title
Hermetic Welding of an Optical Fiber Fabry–Pérot Cavity for a Diaphragm-Based Pressure Sensor Using CO2 Laser
Authors, Artists and Contributors
Author / Creator
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Record Identifier
TN_cdi_doaj_primary_oai_doaj_org_article_3fbb74113d2d423abc73cea83c80344b
Permalink
https://devfeature-collection.sl.nsw.gov.au/record/TN_cdi_doaj_primary_oai_doaj_org_article_3fbb74113d2d423abc73cea83c80344b
Other Identifiers
ISSN
1424-8220
E-ISSN
1424-8220
DOI
10.3390/s22134700
