Study on the piezoresistivity of Cr-doped V2O3 thin film for MEMS sensor applications
Study on the piezoresistivity of Cr-doped V2O3 thin film for MEMS sensor applications
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Publisher
London: Nature Publishing Group UK
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Language
English
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Publisher
London: Nature Publishing Group UK
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Cr-doped V
2
O
3
thin film shows a huge resistivity change with controlled epitaxial strain at room temperature as a result of a gradual Mott metal-insulator phase transition with strain. This novel piezoresistive transduction principle makes Cr-doped V
2
O
3
thin film an appealing piezoresistive material. To investigate the...
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Full title
Study on the piezoresistivity of Cr-doped V2O3 thin film for MEMS sensor applications
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TN_cdi_doaj_primary_oai_doaj_org_article_3fe56670a94f4697bd1c1bb0362b501e
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https://devfeature-collection.sl.nsw.gov.au/record/TN_cdi_doaj_primary_oai_doaj_org_article_3fe56670a94f4697bd1c1bb0362b501e
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ISSN
2055-7434,2096-1030
E-ISSN
2055-7434
DOI
10.1038/s41378-024-00807-0
