Scanning Probe Lithography: State-of-the-Art and Future Perspectives
Scanning Probe Lithography: State-of-the-Art and Future Perspectives
About this item
Full title
Author / Creator
Fan, Pengfei , Gao, Jian , Mao, Hui , Geng, Yanquan , Yan, Yongda , Wang, Yuzhang , Goel, Saurav and Luo, Xichun
Publisher
Switzerland: MDPI AG
Journal title
Language
English
Formats
Publication information
Publisher
Switzerland: MDPI AG
Subjects
More information
Scope and Contents
Contents
High-throughput and high-accuracy nanofabrication methods are required for the ever-increasing demand for nanoelectronics, high-density data storage devices, nanophotonics, quantum computing, molecular circuitry, and scaffolds in bioengineering used for cell proliferation applications. The scanning probe lithography (SPL) nanofabrication technique...
Alternative Titles
Full title
Scanning Probe Lithography: State-of-the-Art and Future Perspectives
Authors, Artists and Contributors
Author / Creator
Identifiers
Primary Identifiers
Record Identifier
TN_cdi_doaj_primary_oai_doaj_org_article_4341b7538cc246f49bec8409b24f3640
Permalink
https://devfeature-collection.sl.nsw.gov.au/record/TN_cdi_doaj_primary_oai_doaj_org_article_4341b7538cc246f49bec8409b24f3640
Other Identifiers
ISSN
2072-666X
E-ISSN
2072-666X
DOI
10.3390/mi13020228
