Detection of Volatile Organic Compounds by Using MEMS Sensors
Detection of Volatile Organic Compounds by Using MEMS Sensors
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Publisher
Switzerland: MDPI AG
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Language
English
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Publisher
Switzerland: MDPI AG
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Contents
We report on the deployment of MEMS static bifurcation (DC) sensors for the detection of volatile organic compounds (VOCs): hydrogen sulfide and formaldehyde. We demonstrate a sensor that can detect as low as a few ppm of hydrogen sulfide. We also demonstrate a sensor array that can selectively detect formaldehyde in the presence of benzene, a clos...
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Full title
Detection of Volatile Organic Compounds by Using MEMS Sensors
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TN_cdi_doaj_primary_oai_doaj_org_article_49ba5b70a4534345a505f979f3ef5f92
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https://devfeature-collection.sl.nsw.gov.au/record/TN_cdi_doaj_primary_oai_doaj_org_article_49ba5b70a4534345a505f979f3ef5f92
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ISSN
1424-8220
E-ISSN
1424-8220
DOI
10.3390/s22114102
