Three-to-One Internal Resonance in MEMS Arch Resonators
Three-to-One Internal Resonance in MEMS Arch Resonators
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Switzerland: MDPI
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English
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Switzerland: MDPI
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We present an investigation of the nonlinear dynamics of a microelectromechanical system (MEMS) arch subjected to a combination of AC and DC loadings in the presence of three-to-one internal resonance. The axial force resulting from the residual stress or temperature variation is considered in the governing equation of motion. The method of multipl...
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Three-to-One Internal Resonance in MEMS Arch Resonators
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TN_cdi_doaj_primary_oai_doaj_org_article_55810d3bac4e4a3c918667313f097d18
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https://devfeature-collection.sl.nsw.gov.au/record/TN_cdi_doaj_primary_oai_doaj_org_article_55810d3bac4e4a3c918667313f097d18
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ISSN
1424-8220
E-ISSN
1424-8220
DOI
10.3390/s19081888