W-Band 4th Order Waveguide Filter Based on Double Layer SU8 Microfabrication
W-Band 4th Order Waveguide Filter Based on Double Layer SU8 Microfabrication
About this item
Full title
Author / Creator
Liu, Min , Yang, Qian , Zhang, Anxue , Guo, Cheng and Chen, Juan
Publisher
Basel: MDPI AG
Journal title
Language
English
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Publication information
Publisher
Basel: MDPI AG
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Scope and Contents
Contents
This paper investigates the fabrication accuracy of the W-band SU-8 photoresist micromachined 4th order waveguide bandpass filters (BPF). The designed filter based on cylindrical resonators is excited in TM010 mode. It is ideally suitable for the layered SU-8 micromachining process as the height of the resonator is much smaller than one wavelength,...
Alternative Titles
Full title
W-Band 4th Order Waveguide Filter Based on Double Layer SU8 Microfabrication
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Author / Creator
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Record Identifier
TN_cdi_doaj_primary_oai_doaj_org_article_58ebe50b72b048a4aa1e1c75d3f335db
Permalink
https://devfeature-collection.sl.nsw.gov.au/record/TN_cdi_doaj_primary_oai_doaj_org_article_58ebe50b72b048a4aa1e1c75d3f335db
Other Identifiers
ISSN
1424-8220
E-ISSN
1424-8220
DOI
10.3390/s22155604
