Effects of Thermal Annealing on the Properties of Zirconium-Doped MgxZn1−XO Films Obtained through R...
Effects of Thermal Annealing on the Properties of Zirconium-Doped MgxZn1−XO Films Obtained through Radio-Frequency Magnetron Sputtering
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Basel: MDPI AG
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English
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Basel: MDPI AG
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Zirconium-doped MgxZn1−xO (Zr-doped MZO) mixed-oxide films were investigated, and the temperature sensitivity of their electric and optical properties was characterized. Zr-doped MZO films were deposited through radio-frequency magnetron sputtering using a 4-inch ZnO/MgO/ZrO2 (75/20/5 wt%) target. Hall measurement, X-ray diffraction (XRD), transmit...
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Full title
Effects of Thermal Annealing on the Properties of Zirconium-Doped MgxZn1−XO Films Obtained through Radio-Frequency Magnetron Sputtering
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TN_cdi_doaj_primary_oai_doaj_org_article_5a751a8b32b04314a3eae1a77cde0705
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https://devfeature-collection.sl.nsw.gov.au/record/TN_cdi_doaj_primary_oai_doaj_org_article_5a751a8b32b04314a3eae1a77cde0705
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ISSN
2077-0375
E-ISSN
2077-0375
DOI
10.3390/membranes11050373
