Design of Acetaldehyde Gas Sensor Based on Piezoelectric Multilayer Microelectromechanical System Re...
Design of Acetaldehyde Gas Sensor Based on Piezoelectric Multilayer Microelectromechanical System Resonator
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Publisher
Switzerland: MDPI AG
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Language
English
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Publisher
Switzerland: MDPI AG
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Acetaldehyde is a volatile organic compound that can cause damage at the cellular and genomic levels. The monitoring of acetaldehyde gas at low concentrations requires fast-response and low-cost sensors. Herein, we propose the design of an acetaldehyde gas sensor based on a low-cost Microelectromechanical System (MEMS) process. This sensor is forme...
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Full title
Design of Acetaldehyde Gas Sensor Based on Piezoelectric Multilayer Microelectromechanical System Resonator
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TN_cdi_doaj_primary_oai_doaj_org_article_5e8830c7aaf547f1ba907b235b50f357
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https://devfeature-collection.sl.nsw.gov.au/record/TN_cdi_doaj_primary_oai_doaj_org_article_5e8830c7aaf547f1ba907b235b50f357
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ISSN
2072-666X
E-ISSN
2072-666X
DOI
10.3390/mi15080962
