Fabrication of a Hydrogenated Amorphous Silicon Detector in 3-D Geometry and Preliminary Test on Pla...
Fabrication of a Hydrogenated Amorphous Silicon Detector in 3-D Geometry and Preliminary Test on Planar Prototypes
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Author / Creator
Menichelli, Mauro , Bizzarri, Marco , Boscardin, Maurizio , Caprai, Mirco , Caricato, Anna Paola , Cirrone, Giuseppe Antonio Pablo , Crivellari, Michele , Cupparo, Ilaria , Cuttone, Giacomo , Dunand, Silvain , Fanò, Livio , Alì, Omar Hammad , Ionica, Maria , Kanxheri, Keida , Large, Matthew , Maruccio, Giuseppe , Monteduro, Anna Grazia , Moscatelli, Francesco , Morozzi, Arianna , Papi, Andrea , Passeri, Daniele , Petasecca, Marco , Rizzato, Silvia , Rossi, Alessandro , Scorzoni, Andrea , Servoli, Leonello , Talamonti, Cinzia , Verzellesi, Giovanni and Wyrsch, Nicolas
Publisher
Basel: MDPI AG
Journal title
Language
English
Formats
Publication information
Publisher
Basel: MDPI AG
Subjects
More information
Scope and Contents
Contents
Hydrogenated amorphous silicon (a-Si:H) can be produced by plasma-enhanced chemical vapor deposition (PECVD) of SiH4 (silane) mixed with hydrogen. The resulting material shows outstanding radiation hardness properties and can be deposited on a wide variety of substrates. Devices employing a-Si:H technologies have been used to detect many different...
Alternative Titles
Full title
Fabrication of a Hydrogenated Amorphous Silicon Detector in 3-D Geometry and Preliminary Test on Planar Prototypes
Authors, Artists and Contributors
Author / Creator
Bizzarri, Marco
Boscardin, Maurizio
Caprai, Mirco
Caricato, Anna Paola
Cirrone, Giuseppe Antonio Pablo
Crivellari, Michele
Cupparo, Ilaria
Cuttone, Giacomo
Dunand, Silvain
Fanò, Livio
Alì, Omar Hammad
Ionica, Maria
Kanxheri, Keida
Large, Matthew
Maruccio, Giuseppe
Monteduro, Anna Grazia
Moscatelli, Francesco
Morozzi, Arianna
Papi, Andrea
Passeri, Daniele
Petasecca, Marco
Rizzato, Silvia
Rossi, Alessandro
Scorzoni, Andrea
Servoli, Leonello
Talamonti, Cinzia
Verzellesi, Giovanni
Wyrsch, Nicolas
Identifiers
Primary Identifiers
Record Identifier
TN_cdi_doaj_primary_oai_doaj_org_article_694fdaa10eb94af8930405816cf17b58
Permalink
https://devfeature-collection.sl.nsw.gov.au/record/TN_cdi_doaj_primary_oai_doaj_org_article_694fdaa10eb94af8930405816cf17b58
Other Identifiers
ISSN
2410-390X
E-ISSN
2410-390X
DOI
10.3390/instruments5040032
