Frequency unlocking-based MEMS bifurcation sensors
Frequency unlocking-based MEMS bifurcation sensors
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London: Nature Publishing Group UK
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English
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London: Nature Publishing Group UK
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MEMS resonators exhibit rich dynamic behaviors under the internal resonance regime. In this work, we present a novel MEMS bifurcation sensor that exploits frequency unlocking due to a 1:3 internal resonance between two electrostatically coupled micro-resonators. The proposed detection mechanism allows the sensor to operate in binary (digital) and a...
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Frequency unlocking-based MEMS bifurcation sensors
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TN_cdi_doaj_primary_oai_doaj_org_article_760ac75606ed4870b4836f08e4cfaa5b
Permalink
https://devfeature-collection.sl.nsw.gov.au/record/TN_cdi_doaj_primary_oai_doaj_org_article_760ac75606ed4870b4836f08e4cfaa5b
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ISSN
2055-7434,2096-1030
E-ISSN
2055-7434
DOI
10.1038/s41378-023-00522-2
