Thermal Nanoimprint Lithography-A Review of the Process, Mold Fabrication, and Material
Thermal Nanoimprint Lithography-A Review of the Process, Mold Fabrication, and Material
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Publisher
Switzerland: MDPI AG
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Language
English
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Publisher
Switzerland: MDPI AG
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Contents
Micro- and nanopatterns perform unique functions and have attracted attention in various industrial fields, such as electronic devices, microfluidics, biotechnology, optics, sensors, and smart and anti-adhesion surfaces. To put fine-patterned products to practical use, low-cost patterning technology is necessary. Nanoimprint lithography (NIL) is a...
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Full title
Thermal Nanoimprint Lithography-A Review of the Process, Mold Fabrication, and Material
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TN_cdi_doaj_primary_oai_doaj_org_article_9348259449424533a4ec8b460808a1c4
Permalink
https://devfeature-collection.sl.nsw.gov.au/record/TN_cdi_doaj_primary_oai_doaj_org_article_9348259449424533a4ec8b460808a1c4
Other Identifiers
ISSN
2079-4991
E-ISSN
2079-4991
DOI
10.3390/nano13142031
