Microstructure-based analysis of fine metal mask cleaning in organic light emitting diode display ma...
Microstructure-based analysis of fine metal mask cleaning in organic light emitting diode display manufacturing
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Publisher
Singapore: Springer Singapore
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Language
English
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Publisher
Singapore: Springer Singapore
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This study proposes the unique method to analyze the cleanliness of the fine metal mask (FMM) used in OLED display manufacturing after FMM cleaning process. We developed a FMM-mimic microstructure as a substitute for the FMM, which can be used for the evaluation of cleaning efficiency. The FMM-mimic microstructure was fabricated using a combination...
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Full title
Microstructure-based analysis of fine metal mask cleaning in organic light emitting diode display manufacturing
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TN_cdi_doaj_primary_oai_doaj_org_article_99216e14492240a7a7086bed3ba813e4
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https://devfeature-collection.sl.nsw.gov.au/record/TN_cdi_doaj_primary_oai_doaj_org_article_99216e14492240a7a7086bed3ba813e4
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ISSN
2213-9621
E-ISSN
2213-9621
DOI
10.1186/s40486-019-0081-x
