Improved Conductivity of Low‐Temperature‐Synthesized Graphene/Cu for CMOS Backend‐of‐Line Interconne...
Improved Conductivity of Low‐Temperature‐Synthesized Graphene/Cu for CMOS Backend‐of‐Line Interconnect Applications
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Publisher
Weinheim: John Wiley & Sons, Inc
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Language
English
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Weinheim: John Wiley & Sons, Inc
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This study proposes a synthesis strategy of high‐quality graphene films on the copper foil at a temperature of 400 °C throughout the graphene growth process without employing high‐temperature annealing. Through continuous CO2 laser pretreatment of the copper foil, the surface smoothness improves, and the removal of copper particles and copper oxide...
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Full title
Improved Conductivity of Low‐Temperature‐Synthesized Graphene/Cu for CMOS Backend‐of‐Line Interconnect Applications
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TN_cdi_doaj_primary_oai_doaj_org_article_9f0d5f98662b4b4ab298972cbbf1f2bb
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https://devfeature-collection.sl.nsw.gov.au/record/TN_cdi_doaj_primary_oai_doaj_org_article_9f0d5f98662b4b4ab298972cbbf1f2bb
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ISSN
2196-7350
E-ISSN
2196-7350
DOI
10.1002/admi.202400622
