Evaluation of Double-Sided Planetary Grinding Using Diamond Wheels for Sapphire Substrates
Evaluation of Double-Sided Planetary Grinding Using Diamond Wheels for Sapphire Substrates
About this item
Full title
Author / Creator
Wang, Lijuan , Hu, Zhongwei , Yu, Yiqing and Xu, Xipeng
Publisher
MDPI AG
Journal title
Language
English
Formats
Publication information
Publisher
MDPI AG
Subjects
More information
Scope and Contents
Contents
Double-sided planetary grinding as an efficient and precise machining method is used for the rapid thinning and flattening process of sapphire substrate. As an intermediate processing technology of sapphire substrate preparation procedure, many experiments are carried out to evaluate the lapping effect in the paper. Surface quality, processing effi...
Alternative Titles
Full title
Evaluation of Double-Sided Planetary Grinding Using Diamond Wheels for Sapphire Substrates
Authors, Artists and Contributors
Author / Creator
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Record Identifier
TN_cdi_doaj_primary_oai_doaj_org_article_9f61f36f71cb475c8041d2546293e0f4
Permalink
https://devfeature-collection.sl.nsw.gov.au/record/TN_cdi_doaj_primary_oai_doaj_org_article_9f61f36f71cb475c8041d2546293e0f4
Other Identifiers
ISSN
2073-4352
E-ISSN
2073-4352
DOI
10.3390/cryst8070262
