Micromachined Accelerometers with Sub-µg/√Hz Noise Floor: A Review
Micromachined Accelerometers with Sub-µg/√Hz Noise Floor: A Review
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Publisher
Basel: MDPI AG
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Language
English
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Publisher
Basel: MDPI AG
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Contents
This paper reviews the research and development of micromachined accelerometers with a noise floor lower than 1 µg/√Hz. Firstly, the basic working principle of micromachined accelerometers is introduced. Then, different methods of reducing the noise floor of micromachined accelerometers are analyzed. Different types of micromachined accelerometers...
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Full title
Micromachined Accelerometers with Sub-µg/√Hz Noise Floor: A Review
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TN_cdi_doaj_primary_oai_doaj_org_article_a40c7f7c45704cfeb3ddb8fd28577ca7
Permalink
https://devfeature-collection.sl.nsw.gov.au/record/TN_cdi_doaj_primary_oai_doaj_org_article_a40c7f7c45704cfeb3ddb8fd28577ca7
Other Identifiers
ISSN
1424-8220,1424-3210
E-ISSN
1424-8220
DOI
10.3390/s20144054
