Ultra-Low-Loss and Broadband All-Silicon Dielectric Waveguides for WR-1 Band (0.75–1.1 THz) Modules
Ultra-Low-Loss and Broadband All-Silicon Dielectric Waveguides for WR-1 Band (0.75–1.1 THz) Modules
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Basel: MDPI AG
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Language
English
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Basel: MDPI AG
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Contents
This study presents ultra-low-loss and broadband all-silicon dielectric waveguides for the WR-1 band (0.75–1.1 THz). The waveguides are built in high-resistivity silicon (10 kΩ-cm) and integrated with supportive frames fabricated from the same silicon wafer in a single etch process to achieve a compact design. We pursued low-loss, broadband, substr...
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Full title
Ultra-Low-Loss and Broadband All-Silicon Dielectric Waveguides for WR-1 Band (0.75–1.1 THz) Modules
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TN_cdi_doaj_primary_oai_doaj_org_article_a425b53fb30d4659a17bd0b255538efc
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https://devfeature-collection.sl.nsw.gov.au/record/TN_cdi_doaj_primary_oai_doaj_org_article_a425b53fb30d4659a17bd0b255538efc
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ISSN
2304-6732
E-ISSN
2304-6732
DOI
10.3390/photonics9080515
