Analysis of the Thermoelastic Damping Effect in Electrostatically Actuated MEMS Resonators
Analysis of the Thermoelastic Damping Effect in Electrostatically Actuated MEMS Resonators
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Basel: MDPI AG
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English
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Basel: MDPI AG
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An important aspect that must be considered when designing micro-electro-mechanical systems (MEMS) for all domains, including robotics, is the thermoelastic damping which occurs when the MEMS material is subjected to cyclic stress. This paper is focused on a model for the thermoelastic damping developed based on the generalized thermoelastic theory...
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Analysis of the Thermoelastic Damping Effect in Electrostatically Actuated MEMS Resonators
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TN_cdi_doaj_primary_oai_doaj_org_article_a4629e78dcff4089bb52d798ffaf68d4
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https://devfeature-collection.sl.nsw.gov.au/record/TN_cdi_doaj_primary_oai_doaj_org_article_a4629e78dcff4089bb52d798ffaf68d4
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ISSN
2227-7390
E-ISSN
2227-7390
DOI
10.3390/math8071124
