Microelectromechanical Systems (MEMS) for Biomedical Applications
Microelectromechanical Systems (MEMS) for Biomedical Applications
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Publisher
Switzerland: MDPI AG
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Language
English
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Publisher
Switzerland: MDPI AG
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Scope and Contents
Contents
The significant advancements within the electronics miniaturization field have shifted the scientific interest towards a new class of precision devices, namely microelectromechanical systems (MEMS). Specifically, MEMS refers to microscaled precision devices generally produced through micromachining techniques that combine mechanical and electrical...
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Full title
Microelectromechanical Systems (MEMS) for Biomedical Applications
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Record Identifier
TN_cdi_doaj_primary_oai_doaj_org_article_b1e90e47f29d41b0974203cea0fde1a6
Permalink
https://devfeature-collection.sl.nsw.gov.au/record/TN_cdi_doaj_primary_oai_doaj_org_article_b1e90e47f29d41b0974203cea0fde1a6
Other Identifiers
ISSN
2072-666X
E-ISSN
2072-666X
DOI
10.3390/mi13020164
