Fabrication of Cylindrical Microlens by Femtosecond Laser‐Assisted Hydrofluoric Acid Wet Etching of...
Fabrication of Cylindrical Microlens by Femtosecond Laser‐Assisted Hydrofluoric Acid Wet Etching of Fused Silica
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Publisher
Hoboken: John Wiley & Sons, Inc
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Language
English
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Publisher
Hoboken: John Wiley & Sons, Inc
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Micro‐optical elements play a key role in various advanced devices, including biomedical, photovoltaic, 3D display, and optical communication devices. As one of the typical micro‐optical elements, cylindrical microlens (CML) can modulate the wavefront phase of the incident light in only one direction. The process methods of CML have been developed...
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Full title
Fabrication of Cylindrical Microlens by Femtosecond Laser‐Assisted Hydrofluoric Acid Wet Etching of Fused Silica
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TN_cdi_doaj_primary_oai_doaj_org_article_b485b742953b4bc69a1e262d12b1c526
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https://devfeature-collection.sl.nsw.gov.au/record/TN_cdi_doaj_primary_oai_doaj_org_article_b485b742953b4bc69a1e262d12b1c526
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ISSN
2699-9293
E-ISSN
2699-9293
DOI
10.1002/adpr.202200227
