Analysis on Characteristics of ZnO Surface Acoustic Wave with and without Micro-Structures
Analysis on Characteristics of ZnO Surface Acoustic Wave with and without Micro-Structures
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Publisher
Switzerland: MDPI AG
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Language
English
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Switzerland: MDPI AG
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In this paper, we fabricate a surface acoustic wave (SAW) device with micro-structures on a zinc oxide (ZnO) thin film and measure its signal response. The manufacturing processes of the SAW device include the fabrication of micro-structures of a SAW element and its interdigital transducer by silicon micro-machining and the fabrication of a thin fi...
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Full title
Analysis on Characteristics of ZnO Surface Acoustic Wave with and without Micro-Structures
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TN_cdi_doaj_primary_oai_doaj_org_article_c446db3ca5bf4ab6817de1458b267abb
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https://devfeature-collection.sl.nsw.gov.au/record/TN_cdi_doaj_primary_oai_doaj_org_article_c446db3ca5bf4ab6817de1458b267abb
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ISSN
2072-666X
E-ISSN
2072-666X
DOI
10.3390/mi10070434
