Recent Developments in Mechanical Ultraprecision Machining for Nano/Micro Device Manufacturing
Recent Developments in Mechanical Ultraprecision Machining for Nano/Micro Device Manufacturing
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Publisher
Switzerland: MDPI AG
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Language
English
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Publisher
Switzerland: MDPI AG
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Scope and Contents
Contents
The production of many components used in MEMS or NEMS devices, especially those with com-plex shapes, requires machining as the best option among manufacturing techniques. Ultraprecision machining is normally employed to achieve the required shapes, dimensional accuracy, or improved surface quality in most of these devices and other areas of appli...
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Full title
Recent Developments in Mechanical Ultraprecision Machining for Nano/Micro Device Manufacturing
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TN_cdi_doaj_primary_oai_doaj_org_article_c53dfef8ffff42a69d85d7eb012f7099
Permalink
https://devfeature-collection.sl.nsw.gov.au/record/TN_cdi_doaj_primary_oai_doaj_org_article_c53dfef8ffff42a69d85d7eb012f7099
Other Identifiers
ISSN
2072-666X
E-ISSN
2072-666X
DOI
10.3390/mi15081030
