Periodic Scheduling Optimization for Dual-Arm Cluster Tools with Arm Task and Residency Time Constra...
Periodic Scheduling Optimization for Dual-Arm Cluster Tools with Arm Task and Residency Time Constraints via Petri Net Model
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Author / Creator
Gu, Lei , Wu, Naiqi , Li, Tan , Zhang, Siwei and Wu, Wenyu
Publisher
Basel: MDPI AG
Journal title
Language
English
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Publisher
Basel: MDPI AG
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Contents
In order to improve quality assurance in wafer manufacturing, there are strict process requirements. Besides the well-known residency time constraints (RTCs), a dual-arm cluster tool also requires each robot arm to execute a specific set of tasks. We call such a tool an arm task-constrained dual-arm cluster tool (ATC-DACT). To do this, one of the a...
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Full title
Periodic Scheduling Optimization for Dual-Arm Cluster Tools with Arm Task and Residency Time Constraints via Petri Net Model
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Record Identifier
TN_cdi_doaj_primary_oai_doaj_org_article_ceeddb14723b4b4b87c4db38d6bafda8
Permalink
https://devfeature-collection.sl.nsw.gov.au/record/TN_cdi_doaj_primary_oai_doaj_org_article_ceeddb14723b4b4b87c4db38d6bafda8
Other Identifiers
ISSN
2227-7390
E-ISSN
2227-7390
DOI
10.3390/math12182912
