The High-Efficiency Design Method for Capacitive MEMS Accelerometer
The High-Efficiency Design Method for Capacitive MEMS Accelerometer
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Publisher
Basel: MDPI AG
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Language
English
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Basel: MDPI AG
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Contents
In this research, a high-efficiency design method of the capacitive MEMS accelerometer is proposed. As the MEMS accelerometer has high precision and a compact structure, much research has been carried out, which mainly focused on the structural design and materials selection. To overcome the inconvenience and inaccuracy of the traditional design me...
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Full title
The High-Efficiency Design Method for Capacitive MEMS Accelerometer
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TN_cdi_doaj_primary_oai_doaj_org_article_ed2d0197d57341d3924c05f81c049c6e
Permalink
https://devfeature-collection.sl.nsw.gov.au/record/TN_cdi_doaj_primary_oai_doaj_org_article_ed2d0197d57341d3924c05f81c049c6e
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ISSN
2072-666X
E-ISSN
2072-666X
DOI
10.3390/mi14101891
