Research Progress of MEMS Inertial Switches
Research Progress of MEMS Inertial Switches
About this item
Full title
Author / Creator
Liu, Min , Wu, Xinyang , Niu, Yanxu , Yang, Haotian , Zhu, Yingmin and Wang, Weidong
Publisher
Switzerland: MDPI AG
Journal title
Language
English
Formats
Publication information
Publisher
Switzerland: MDPI AG
Subjects
More information
Scope and Contents
Contents
As a typical type of MEMS acceleration sensor, the inertial switch can alter its on-off state while the environmental accelerations satisfy threshold value. An exhaustive summary of the design concept, performance aspects, and fabrication methods of the micro electromechanical system (MEMS) inertial switch is provided. Different MEMS inertial switc...
Alternative Titles
Full title
Research Progress of MEMS Inertial Switches
Authors, Artists and Contributors
Author / Creator
Identifiers
Primary Identifiers
Record Identifier
TN_cdi_doaj_primary_oai_doaj_org_article_f41cb882f219419b82a9f27ee8f689c3
Permalink
https://devfeature-collection.sl.nsw.gov.au/record/TN_cdi_doaj_primary_oai_doaj_org_article_f41cb882f219419b82a9f27ee8f689c3
Other Identifiers
ISSN
2072-666X
E-ISSN
2072-666X
DOI
10.3390/mi13030359
