Dissolution of donor-vacancy clusters in heavily doped n-type germanium
Dissolution of donor-vacancy clusters in heavily doped n-type germanium
About this item
Full title
Author / Creator
Prucnal, Slawomir , Liedke, Maciej O , Wang, Xiaoshuang , Butterling, Maik , Posselt, Matthias , Knoch, Joachim , Windgassen, Horst , Hirschmann, Eric , Berencén, Yonder , Rebohle, Lars , Wang, Mao , Napoltani, Enrico , Frigerio, Jacopo , Ballabio, Andrea , Isella, Giovani , Hübner, René , Wagner, Andreas , Bracht, Hartmut , Helm, Manfred and Zhou, Shengqiang
Publisher
Bristol: IOP Publishing
Journal title
Language
English
Formats
Publication information
Publisher
Bristol: IOP Publishing
Subjects
More information
Scope and Contents
Contents
The n-type doping of Ge is a self-limiting process due to the formation of vacancy-donor complexes (DnV with n ⩽ 4) that deactivate the donors. This work unambiguously demonstrates that the dissolution of the dominating P4V clusters in heavily phosphorus-doped Ge epilayers can be achieved by millisecond-flash lamp annealing at about 1050 K. The P4V...
Alternative Titles
Full title
Dissolution of donor-vacancy clusters in heavily doped n-type germanium
Authors, Artists and Contributors
Author / Creator
Liedke, Maciej O
Wang, Xiaoshuang
Butterling, Maik
Posselt, Matthias
Knoch, Joachim
Windgassen, Horst
Hirschmann, Eric
Berencén, Yonder
Rebohle, Lars
Wang, Mao
Napoltani, Enrico
Frigerio, Jacopo
Ballabio, Andrea
Isella, Giovani
Hübner, René
Wagner, Andreas
Bracht, Hartmut
Helm, Manfred
Zhou, Shengqiang
Identifiers
Primary Identifiers
Record Identifier
TN_cdi_doaj_primary_oai_doaj_org_article_f64db16d864945078b3035d039906df9
Permalink
https://devfeature-collection.sl.nsw.gov.au/record/TN_cdi_doaj_primary_oai_doaj_org_article_f64db16d864945078b3035d039906df9
Other Identifiers
ISSN
1367-2630
E-ISSN
1367-2630
DOI
10.1088/1367-2630/abc466
