Scheduling Cluster Tools with Multi-Space Process Modules and a Multi-Finger-Arm Robot in Wafer Fabr...
Scheduling Cluster Tools with Multi-Space Process Modules and a Multi-Finger-Arm Robot in Wafer Fabrication Subject to Wafer Residency Time Constraints
About this item
Full title
Author / Creator
Gu, Lei , Wu, Naiqi , Qiao, Yan , Zhang, Siwei and Li, Tan
Publisher
Basel: MDPI AG
Journal title
Language
English
Formats
Publication information
Publisher
Basel: MDPI AG
Subjects
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Scope and Contents
Contents
To increase productivity, more sophisticated cluster tools are developed. To achieve this, one of the ways is to increase the number of spaces in a process module (PM) and the number of fingers on a robot arm as well, leading to a cluster tool with multi-space PMs and a multi-finger-arm robot. This paper discusses the scheduling problem of cluster...
Alternative Titles
Full title
Scheduling Cluster Tools with Multi-Space Process Modules and a Multi-Finger-Arm Robot in Wafer Fabrication Subject to Wafer Residency Time Constraints
Authors, Artists and Contributors
Author / Creator
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Record Identifier
TN_cdi_doaj_primary_oai_doaj_org_article_f8418605d38d43f9aa0bf71b8b0b50f1
Permalink
https://devfeature-collection.sl.nsw.gov.au/record/TN_cdi_doaj_primary_oai_doaj_org_article_f8418605d38d43f9aa0bf71b8b0b50f1
Other Identifiers
ISSN
2076-3417
E-ISSN
2076-3417
DOI
10.3390/app14209490
