A Systematic Design Optimization Approach for Multiphysics MEMS Devices Based on Combined Computer E...
A Systematic Design Optimization Approach for Multiphysics MEMS Devices Based on Combined Computer Experiments and Gaussian Process Modelling
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Basel: MDPI AG
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English
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Basel: MDPI AG
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This paper presents a systematic and efficient design approach for the two degree-of-freedom (2-DoF) capacitive microelectromechanical systems (MEMS) accelerometer by using combined design and analysis of computer experiments (DACE) and Gaussian process (GP) modelling. Multiple output responses of the MEMS accelerometer including natural frequency,...
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A Systematic Design Optimization Approach for Multiphysics MEMS Devices Based on Combined Computer Experiments and Gaussian Process Modelling
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TN_cdi_doaj_primary_oai_doaj_org_article_fbddf3b1230e41ebbc9b2460ce959f04
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https://devfeature-collection.sl.nsw.gov.au/record/TN_cdi_doaj_primary_oai_doaj_org_article_fbddf3b1230e41ebbc9b2460ce959f04
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ISSN
1424-8220
E-ISSN
1424-8220
DOI
10.3390/s21217242
