Ultralow-Noise SiN Trampoline Resonators for Sensing and Optomechanics
Ultralow-Noise SiN Trampoline Resonators for Sensing and Optomechanics
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College Park: American Physical Society
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English
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College Park: American Physical Society
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In force sensing, optomechanics, and quantum motion experiments, it is typically advantageous to create lightweight, compliant mechanical elements with the lowest possible force noise. Here, we report the fabrication and characterization of high-aspect-ratio, nanogram-scale Si3N4 “trampolines” having quality factors above 4×107 and ringdown times e...
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Ultralow-Noise SiN Trampoline Resonators for Sensing and Optomechanics
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TN_cdi_doaj_primary_oai_doaj_org_article_fc874d9cfc2241c9b205aa5ae8e85f39
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https://devfeature-collection.sl.nsw.gov.au/record/TN_cdi_doaj_primary_oai_doaj_org_article_fc874d9cfc2241c9b205aa5ae8e85f39
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ISSN
2160-3308
E-ISSN
2160-3308
DOI
10.1103/PhysRevX.6.021001
