Flattening of silicon wafers

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Flattening of silicon wafers

https://devfeature-collection.sl.nsw.gov.au/record/TN_cdi_gale_infotracacademiconefile_A349222634

Flattening of silicon wafers

About this item

Full title

Flattening of silicon wafers

Author / Creator

Dobrescu, Tiberiu Gabriel , Nicolescu, Adrian Florin , Pascu, Nicoleta and Dobre, Daniel

Publisher

DAAAM International Vienna

Journal title

Annals of DAAAM & proceedings, 2011, p.441

Language

English

Formats

Conference Proceedings

Publication information

Publisher

DAAAM International Vienna

More information

Alternative Titles

Full title

Flattening of silicon wafers

Authors, Artists and Contributors

Author / Creator

Dobrescu, Tiberiu Gabriel
Nicolescu, Adrian Florin
Pascu, Nicoleta
Dobre, Daniel

Identifiers

Primary Identifiers

Record Identifier

TN_cdi_gale_infotracacademiconefile_A349222634

Permalink

https://devfeature-collection.sl.nsw.gov.au/record/TN_cdi_gale_infotracacademiconefile_A349222634

Other Identifiers

ISSN

1726-9679

E-ISSN

1726-9679

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