Optical monitoring of the deposition process of ferroelectric films
Optical monitoring of the deposition process of ferroelectric films
About this item
Full title
Author / Creator
Publisher
Moscow: Pleiades Publishing
Journal title
Language
English
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Publisher
Moscow: Pleiades Publishing
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Scope and Contents
Contents
A method of optical monitoring of deposition of ferroelectric Ba
0.8
Sr
0.2
TiO
3
films grown by high-frequency reactive plasma-enhanced chemical deposition has been considered. The studies of the plasma in the optical range have demonstrated that the emission spectrum at wavelengths λ > 450 nm is not changed in the range of bias...
Alternative Titles
Full title
Optical monitoring of the deposition process of ferroelectric films
Authors, Artists and Contributors
Author / Creator
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Record Identifier
TN_cdi_gale_infotracacademiconefile_A454730148
Permalink
https://devfeature-collection.sl.nsw.gov.au/record/TN_cdi_gale_infotracacademiconefile_A454730148
Other Identifiers
ISSN
1063-7834
E-ISSN
1090-6460
DOI
10.1134/S1063783415070021
