Optimisation of processing conditions during CVD growth of 2D WS.sub.2 films from a chloride precurs...
Optimisation of processing conditions during CVD growth of 2D WS.sub.2 films from a chloride precursor
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Springer
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English
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Springer
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Monolayer tungsten disulphide (WS.sub.2) is a direct band gap semiconductor which holds promise for a wide range of optoelectronic applications. The large-area growth of WS.sub.2 has previously been successfully achieved using a W(CO).sub.6 precursor, however, this is flammable and a potent source of carbon monoxide (CO) upon decomposition. To addr...
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Full title
Optimisation of processing conditions during CVD growth of 2D WS.sub.2 films from a chloride precursor
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TN_cdi_gale_infotracacademiconefile_A689534909
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https://devfeature-collection.sl.nsw.gov.au/record/TN_cdi_gale_infotracacademiconefile_A689534909
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ISSN
0022-2461
DOI
10.1007/s10853-021-06708-1
