Environmentally friendly single-wafer spin cleaning

https://devfeature-collection.sl.nsw.gov.au/record/TN_cdi_gale_infotracmisc_A57844375

Full title

Author / Creator

Publisher

PennWell Publishing Corp

Journal title

Solid state technology, 1999-11, Vol.42 (11), p.73

Language

English

Publisher

PennWell Publishing Corp

Subjects and topics

Full title

Environmentally friendly single-wafer spin cleaning

Author / Creator

Record Identifier

TN_cdi_gale_infotracmisc_A57844375

Permalink

https://devfeature-collection.sl.nsw.gov.au/record/TN_cdi_gale_infotracmisc_A57844375

ISSN

0038-111X

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