Towards Green 3D-Microfabrication of Bio-MEMS Devices Using ADEX Dry Film Photoresists
Towards Green 3D-Microfabrication of Bio-MEMS Devices Using ADEX Dry Film Photoresists
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Publisher
Seoul: Korean Society for Precision Engineering
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Language
English
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Publisher
Seoul: Korean Society for Precision Engineering
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Scope and Contents
Contents
Current trends in miniaturized diagnostics indicate an increasing demand for large quantities of mobile devices for health monitoring and point-of-care diagnostics. This comes along with a need for rapid but preferably also green microfabrication. Dry film photoresists (DFPs) promise low-cost and greener microfabrication and can partly or fully rep...
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Full title
Towards Green 3D-Microfabrication of Bio-MEMS Devices Using ADEX Dry Film Photoresists
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Record Identifier
TN_cdi_nrf_kci_oai_kci_go_kr_ARTI_9918717
Permalink
https://devfeature-collection.sl.nsw.gov.au/record/TN_cdi_nrf_kci_oai_kci_go_kr_ARTI_9918717
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ISSN
2288-6206
E-ISSN
2198-0810
DOI
10.1007/s40684-021-00367-y