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Towards Green 3D-Microfabrication of Bio-MEMS Devices Using ADEX Dry Film Photoresists

Towards Green 3D-Microfabrication of Bio-MEMS Devices Using ADEX Dry Film Photoresists

https://devfeature-collection.sl.nsw.gov.au/record/TN_cdi_nrf_kci_oai_kci_go_kr_ARTI_9918717

Towards Green 3D-Microfabrication of Bio-MEMS Devices Using ADEX Dry Film Photoresists

About this item

Full title

Towards Green 3D-Microfabrication of Bio-MEMS Devices Using ADEX Dry Film Photoresists

Publisher

Seoul: Korean Society for Precision Engineering

Journal title

International Journal of Precision Engineering and Manufacturing-Green Technology, 2022, 9(1), , pp.43-57

Language

English

Formats

Publication information

Publisher

Seoul: Korean Society for Precision Engineering

More information

Scope and Contents

Contents

Current trends in miniaturized diagnostics indicate an increasing demand for large quantities of mobile devices for health monitoring and point-of-care diagnostics. This comes along with a need for rapid but preferably also green microfabrication. Dry film photoresists (DFPs) promise low-cost and greener microfabrication and can partly or fully rep...

Alternative Titles

Full title

Towards Green 3D-Microfabrication of Bio-MEMS Devices Using ADEX Dry Film Photoresists

Identifiers

Primary Identifiers

Record Identifier

TN_cdi_nrf_kci_oai_kci_go_kr_ARTI_9918717

Permalink

https://devfeature-collection.sl.nsw.gov.au/record/TN_cdi_nrf_kci_oai_kci_go_kr_ARTI_9918717

Other Identifiers

ISSN

2288-6206

E-ISSN

2198-0810

DOI

10.1007/s40684-021-00367-y

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