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음극 아크 증착으로 제조된 AlTiN 박막의 특성

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음극 아크 증착으로 제조된 AlTiN 박막의 특성

https://devfeature-collection.sl.nsw.gov.au/record/TN_cdi_nurimedia_primary_NODE06703384

음극 아크 증착으로 제조된 AlTiN 박막의 특성

About this item

Full title

음극 아크 증착으로 제조된 AlTiN 박막의 특성

Author / Creator

양지훈(Ji-Hoon Yang) , 김성환(Sung-Hwan Kim) , 송민아(Min-A Song) , 정재훈(Jae-Hun Jung) and 정재인(Jae-In Jeong)

Publisher

한국표면공학회

Journal title

Biuletyn Uniejowski, 2016, Vol.49 (3), p.307-315

Language

Korean

Formats

Articles

Publication information

Publisher

한국표면공학회

More information

Alternative Titles

Full title

음극 아크 증착으로 제조된 AlTiN 박막의 특성

Authors, Artists and Contributors

Author / Creator

Identifiers

Primary Identifiers

Record Identifier

TN_cdi_nurimedia_primary_NODE06703384

Permalink

https://devfeature-collection.sl.nsw.gov.au/record/TN_cdi_nurimedia_primary_NODE06703384

Other Identifiers

ISSN

1225-8024

E-ISSN

2299-8403

DOI

10.5695/JKISE.2016.49.3.307

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