Intrinsic ferroelectricity in Y-doped HfO2 thin films
Intrinsic ferroelectricity in Y-doped HfO2 thin films
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London: Nature Publishing Group UK
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English
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London: Nature Publishing Group UK
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Ferroelectric HfO
2
-based materials hold great potential for the widespread integration of ferroelectricity into modern electronics due to their compatibility with existing Si technology. Earlier work indicated that a nanometre grain size was crucial for the stabilization of the ferroelectric phase. This constraint, associated with a high de...
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Intrinsic ferroelectricity in Y-doped HfO2 thin films
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TN_cdi_osti_scitechconnect_1877162
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https://devfeature-collection.sl.nsw.gov.au/record/TN_cdi_osti_scitechconnect_1877162
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ISSN
1476-1122
E-ISSN
1476-4660
DOI
10.1038/s41563-022-01282-6