Chemical Vapor Deposition of Zirconium Compounds: A Review
Chemical Vapor Deposition of Zirconium Compounds: A Review
About this item
Full title
Chemical Vapor Deposition of Zirconium Compounds: A Review
Author / Creator
Publisher
Basel: MDPI AG
Journal title
Coatings (Basel), 2023-02, Vol.13 (2), p.266
Language
English
Formats
Publication information
Publisher
Basel: MDPI AG
Subjects
More information
Scope and Contents
Contents
Coatings of zirconium compounds are used in a wide variety of fields, yet an understanding and descriptions of deposition mechanisms are scant in the public literature. The mechanisms of deposition for metallic zirconium, ZrC, ZrN, ZrO2, ZrB2, and zirconium silicides are discussed based on the direct vapor deposition research of those compounds whe...
Alternative Titles
Full title
Chemical Vapor Deposition of Zirconium Compounds: A Review
Authors, Artists and Contributors
Identifiers
Primary Identifiers
Record Identifier
TN_cdi_osti_scitechconnect_1928958
Permalink
https://devfeature-collection.sl.nsw.gov.au/record/TN_cdi_osti_scitechconnect_1928958
Other Identifiers
ISSN
2079-6412
E-ISSN
2079-6412
DOI
10.3390/coatings13020266
